Métrologie de la tenue au flux laser

Abstract

In the present work, TiO2 thin films were deposited on glass substrates at different shrinkage rates using the Sol-Gel process, with the aim of studying the evaluation of laser flux resistance and the influence of its parameters. The resulting layers were characterized by AFM microscopy, UV-Visible spectrophotometer and profilometry. Finally, we carried out statistical measurements standardized to ISO 11254 using two test methods, 1-on-1 and S-on-1, to determine the damage threshold. AFM microscopy revealed that the layers were homogeneous, with no cracks on the sample surface. UV-VIS analysis showed that the layers are opaque in the UV and relatively transparent in the visible. In fact, the transmittance value T is greater than 82%. Profilometry showed that layer thickness varies proportionally with shrinkage rate. Evaluation of laser flux resistance showed that damage varies proportionally with fluence. The damage threshold (LIDT) is inversely proportional to thickness and irradiation time, and directly affected by laser working distance.